Lam Research Donates Leading-Edge Etch System to Accelerate Nanofabrication R&D at UC Berkeley
Lam Research (LRCX) has donated an advanced multi-chamber semiconductor etching system to UC Berkeley's Marvell Nanofabrication Laboratory to enhance research and development capabilities for next-generation chip technologies. The system combines Lam's Kiyo® conductor and metal etch, Flex® dielectric etch, and Syndion® GP deep reactive ion etch chambers on a Lam 2300® platform.
The donation will provide researchers access to state-of-the-art etching technology for fabricating nanoscale semiconductor devices, particularly for Specialty Technologies applications including optoelectronics, photonics, sensors, and RF solutions. The Berkeley Marvell NanoLab serves as a shared research center for academic and industrial researchers.
This contribution extends Lam's ongoing collaboration with UC Berkeley, which includes funding foundational research within the College of Engineering and maintaining its position as a founding industry member of the Berkeley Emerging Technologies Research (BETR) Center.
Lam Research (LRCX) ha donato un avanzato sistema di incisione semiconduttore multi-camera al Laboratorio di Nanofabbricazione Marvell dell'Università di Berkeley per potenziare le capacità di ricerca e sviluppo sulle tecnologie dei chip di nuova generazione. Il sistema integra le camere di incisione Kiyo® per conduttori e metalli, Flex® per dielettrici e Syndion® GP per incisione profonda a ioni reattivi su una piattaforma Lam 2300®.
La donazione offrirà ai ricercatori l'accesso a tecnologie di incisione all'avanguardia per la fabbricazione di dispositivi semiconduttori a scala nanometrica, in particolare per applicazioni di Tecnologie Speciali come optoelettronica, fotonica, sensori e soluzioni RF. Il Berkeley Marvell NanoLab funge da centro di ricerca condiviso tra accademici e industrie.
Questo contributo rafforza la collaborazione continua di Lam con UC Berkeley, che include il finanziamento della ricerca di base presso il College of Engineering e il mantenimento del ruolo di membro fondatore dell'industria nel Berkeley Emerging Technologies Research (BETR) Center.
Lam Research (LRCX) ha donado un avanzado sistema de grabado semiconductor de múltiples cámaras al Laboratorio de Nanofabricación Marvell de la Universidad de Berkeley para mejorar las capacidades de investigación y desarrollo en tecnologías de chips de próxima generación. El sistema combina las cámaras de grabado Kiyo® para conductores y metales, Flex® para dieléctricos y Syndion® GP para grabado profundo por iones reactivos sobre una plataforma Lam 2300®.
La donación proporcionará a los investigadores acceso a tecnología de grabado de última generación para fabricar dispositivos semiconductores a escala nanométrica, especialmente para aplicaciones de Tecnologías Especiales como optoelectrónica, fotónica, sensores y soluciones RF. El Berkeley Marvell NanoLab funciona como un centro de investigación compartido entre académicos e industria.
Esta contribución amplía la colaboración continua de Lam con UC Berkeley, que incluye la financiación de investigación fundamental en el College of Engineering y el mantenimiento de su posición como miembro fundador industrial del Berkeley Emerging Technologies Research (BETR) Center.
Lam Research (LRCX)는 차세대 칩 기술 연구개발 역량 강화를 위해 UC 버클리의 Marvell 나노패브리케이션 연구소에 첨단 다중 챔버 반도체 식각 시스템을 기증했습니다. 이 시스템은 Lam 2300® 플랫폼 위에 Kiyo® 도체 및 금속 식각, Flex® 유전체 식각, Syndion® GP 심층 반응성 이온 식각 챔버를 결합한 것입니다.
이번 기증으로 연구자들은 나노 스케일 반도체 장치 제조를 위한 최첨단 식각 기술에 접근할 수 있게 되며, 특히 광전자공학, 광학, 센서 및 RF 솔루션을 포함한 특수 기술 응용 분야에 활용될 예정입니다. 버클리 Marvell NanoLab은 학계와 산업계 연구자들이 공동으로 사용하는 연구 센터입니다.
이번 기여는 Lam이 UC 버클리와 지속적으로 협력하는 일환으로, 공대 내 기초 연구 자금 지원과 Berkeley Emerging Technologies Research (BETR) 센터의 창립 산업 회원으로서의 지위를 유지하는 내용을 포함합니다.
Lam Research (LRCX) a fait don d’un système avancé de gravure de semi-conducteurs multi-chambres au laboratoire de nanofabrication Marvell de l’Université de Berkeley afin de renforcer les capacités de recherche et développement pour les technologies de puces de nouvelle génération. Le système combine les chambres de gravure Kiyo® pour conducteurs et métaux, Flex® pour diélectriques, et Syndion® GP pour gravure ionique réactive profonde sur une plateforme Lam 2300®.
Ce don offrira aux chercheurs un accès à une technologie de gravure de pointe pour la fabrication de dispositifs semi-conducteurs à l’échelle nanométrique, notamment pour les applications Technologies Spécialisées telles que l’optoélectronique, la photonique, les capteurs et les solutions RF. Le Berkeley Marvell NanoLab sert de centre de recherche partagé entre chercheurs académiques et industriels.
Cette contribution prolonge la collaboration continue de Lam avec l’UC Berkeley, qui inclut le financement de la recherche fondamentale au sein du College of Engineering et le maintien de son statut de membre fondateur industriel du Berkeley Emerging Technologies Research (BETR) Center.
Lam Research (LRCX) hat dem Marvell Nanofabrication Laboratory der UC Berkeley ein fortschrittliches Mehrkammer-Halbleiterätzsystem gespendet, um die Forschungs- und Entwicklungskapazitäten für Chiptechnologien der nächsten Generation zu verbessern. Das System kombiniert Lams Kiyo® Leiter- und Metallätz-, Flex® Dielektrikumätz- und Syndion® GP Tiefreaktive-Ionenätzkammern auf einer Lam 2300® Plattform.
Die Spende ermöglicht Forschern den Zugang zu modernster Ätztechnologie zur Herstellung nanoskaliger Halbleiterbauelemente, insbesondere für Spezialtechnologie-Anwendungen wie Optoelektronik, Photonik, Sensorik und RF-Lösungen. Das Berkeley Marvell NanoLab dient als gemeinsames Forschungszentrum für akademische und industrielle Forscher.
Dieser Beitrag erweitert die laufende Zusammenarbeit von Lam mit der UC Berkeley, die die Finanzierung grundlegender Forschung am College of Engineering sowie die Rolle als Gründungsmitglied der Industrie im Berkeley Emerging Technologies Research (BETR) Center umfasst.
- Strategic expansion of academic-industry collaboration strengthening LRCX's position in emerging semiconductor technologies
- Enhanced presence in quantum computing and AI hardware development through research partnership
- Positioning for future innovations in optical communications and data center infrastructure
- None.
The Berkeley Marvell NanoLab is a shared research center providing cross-departmental principal investigators and hundreds of academic and industrial researchers with access to micro- and nano-fabrication technologies typically only found in modern fab facilities. Lam's latest contribution builds on the company's long history of collaboration with UC Berkeley to expand research and educational activities in nanoscale science and engineering to accelerate the pace of innovation for semiconductor manufacturing.
"We believe that academia-industry collaboration is crucial to driving the nanofabrication advancements needed for new generations of Specialty Technologies," said Vahid Vahedi, chief technology and sustainability officer at Lam Research. "Lam's donation will give UC Berkeley's NanoLab researchers the ability to work directly with an industry-proven semiconductor manufacturing system in their efforts to accelerate innovation and develop new, novel processes."
The system combines Lam's Kiyo® conductor and metal etch, Flex® dielectric etch, and a state-of-the-art Syndion® GP deep reactive ion etch chambers on a Lam 2300® platform. It is capable of etching a broad range of materials needed for manufacturing next-generation semiconductor devices and advancing Specialty Technology applications such as optoelectronics and photonics, sensors and radio frequency (RF) solutions.
In addition to Lam's donation, the company's ongoing collaboration with UC Berkeley includes funding of foundational research within the College of Engineering. Lam's etch technologies will enable expanded pathfinding in new fabrication processes for integrated optical solutions such as switches, waveguides, electro optic modulators and fiber coupling technologies. Such optical elements are critical building blocks in the advancement of photonic integrated circuits and optical interconnects, solutions that are expected to serve as critical enablers for applications including optical communications, advanced AI hardware, data center infrastructure and quantum information processing.
"We thank Lam Research for its many contributions over the years to UC Berkeley's Marvell NanoLab in support of research and innovation for nanofabrication technologies," said Tsu-Jae King Liu, dean of UC Berkeley's College of Engineering. "Lam's latest donation gives our researchers and students access to wafer-processing capabilities rarely accessible outside of the most sophisticated semiconductor manufacturing facilities. I look forward to seeing Lam's advanced etching system enable new atomic-scale innovations for next-generation chips in the years ahead."
As one of the founding industry members of the Berkeley Emerging Technologies Research (BETR) Center, Lam continues to support semiconductor R&D at the university where it has an endowed Lam Research Distinguished Chair in Semiconductor Processing.
About Lam Research
Lam Research Corporation is a global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Lam's equipment and services allow customers to build smaller and better performing devices. In fact, today, nearly every advanced chip is built with Lam technology. We combine superior systems engineering, technology leadership, and a strong values-based culture, with an unwavering commitment to our customers. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company headquartered in
About UC Berkeley College of Engineering
Berkeley Engineering is recognized globally for its educational and research excellence, consistently ranked among the top three engineering colleges in
Lam Research Contacts:
Laura Bakken
Media Relations
(510) 572-5029
publicrelations@lamresearch.com
Ram Ganesh
Investor Relations
(510) 572-1615
investor.relations@lamresearch.com
Source: Lam Research Corporation, (Nasdaq: LRCX)
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