Lam Research Introduces Breakthrough Deposition Technique to Enable Next-Generation MEMS for 5G and Beyond

Rhea-AI Summary

Lam Research Corp. introduces Pulsus PLD system for advanced MEMS-based microphones and RF filters, enhancing device performance. The system delivers high scandium content films, optimizing RF filters and MEMS microphones. Pulsus offers unique benefits for specialty technologies, enabling efficient manufacturing and material deposition. The technology is a game-changer in the specialty market, driving innovation and product advancement.

Market Research Analyst

The introduction of Lam Research Corp's Pulsus™ PLD system marks a significant advancement in deposition technology, particularly for the production of MEMS-based microphones and RF filters. The system's capability to deliver aluminum scandium nitride (AlScN) films with high scandium content is a key differentiator, as it directly impacts the performance of devices critical to the functionality of 5G and other wireless technologies. The market for such devices is rapidly expanding, with 5G infrastructure deployment and the proliferation of smart devices driving demand.

By offering the highest scandium concentration in AlScN films, Lam is positioning itself to capture a sizeable share of the specialty device manufacturing market. This move could potentially increase its competitive edge and market share, translating into positive financial outcomes for the company. The efficiency gains from Pulsus could also lead to cost savings for chipmakers, which might result in stronger partnerships and increased sales volumes for Lam. However, the adoption rate of this new technology and its integration into high-volume manufacturing will be critical factors in realizing these potential benefits.

Semiconductor Industry Expert

The semiconductor industry is witnessing a surge in demand for high-performance materials, such as those enabled by the Pulsus™ PLD system. The unique benefits of the PLD process, including the ability to deposit complex multi-element materials, provide Lam Research with an opportunity to address emerging markets like AR/VR and quantum computing. This is not just a technical achievement but a strategic move that could influence the direction of the specialty semiconductor market.

AlScN films with high scandium content improve device performance by enhancing electrical conversion, which is critical for the efficiency of RF filters and MEMS microphones. The technology's potential to replace lead-based materials with lead-free alternatives like AlScN could also align with increasing environmental and health regulations, potentially opening up new markets for Lam. However, the long-term success of this innovation will depend on the scalability of the PLD process and the ability of Lam to maintain a lead in material quality as competitors seek to develop similar capabilities.

Financial Analyst

Lam Research Corp's announcement of the Pulsus™ PLD system represents a strategic investment in specialty semiconductor technologies that could have a positive impact on its financial performance. The system's ability to enhance the performance of MEMS-based microphones and RF filters could lead to increased demand for Lam's products, particularly as the industry shifts towards more advanced consumer and automotive devices.

The financial implications of this innovation include potential revenue growth from new sales and the strengthening of Lam's market position. The company's stock value may respond favorably to this news, as investors often look for companies with a clear path to technological leadership and market expansion. Nonetheless, the actual impact on the stock market will depend on the execution of this technology's rollout and market adoption rates, as well as Lam's ability to defend its intellectual property against competitors.

FREMONT, Calif., March 26, 2024 /PRNewswire/ -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable next-generation MEMS-based microphones and radio frequency (RF) filters. Lam's Pulsus™ PLD system delivers aluminum scandium nitride (AlScN) films with the highest scandium content available. This paves the way for advanced consumer and automotive devices with enhanced performance, capability and functionality. Pulsus is now shipping to select specialty device manufacturers. 

This new deposition technique can help advance device designs and accelerate product roadmaps in the specialty market.

The addition of Pulsus PLD to the Lam portfolio further expands Lam's comprehensive range of deposition, etch and single-wafer clean products focused on specialty technologies and demonstrates Lam's continuous innovation in this sector. 

"Lam leveraged deep expertise in specialty semiconductor technologies, proven capabilities in deposition, and a strategic collaboration with CEA-Leti to bring this game-changing solution to customers on our production-proven 2300^® platform," said Chris Carter, group vice president and general manager of the Customer Support Business Group at Lam Research. "This new deposition technique can help advance device designs and accelerate product roadmaps in the specialty market."

Cutting-Edge Films Drive High Performance Devices
RF filters play a critical role in 5G, WiFi 6 and WiFi 6E performance by increasing the number of bands a network can handle while also improving each user's experience. MEMS microphones are valued for a high signal-to-noise ratio that allows them to capture even muffled sounds accurately — essential for voice control features and noise cancellation in 5G-enabled devices.

Pulsus uses breakthrough technology to deposit high-quality films that optimize RF filters and MEMS microphones. The higher the scandium level in the film, the better the performance of the devices. Pulsus delivers films composed of at least 40% scandium — the highest concentration available today. These films feature low dielectric loss and twice the piezo coefficient of current sputtered films, optimizing electrical conversion to drive enhanced sensitivity in RF filters and better performance in MEMS microphones. Further, improved piezoelectric qualities make it feasible to replace lead zirconate titanate (PZT) with lead-free AlScN.

In Pulsus' PLD process, an intense laser pulse is used to strike a target material. The target is vaporized, creating a stable, dense plasma plume that is deposited in thin layers onto a wafer. This process is vital for achieving high-quality, uniform films with precise control over thickness and stress. Pulsus represents the first time lasers have been used for thin film deposition in high-volume manufacturing.

Pulsus Provides Unique Benefits for Specialty Technologies
"Demand for manufacturing equipment used to make MEMS devices grew to over $940M in 2023 and could keep growing as chipmakers find new ways to improve device performance. The superior film quality of Pulsus holds tremendous value for 5G applications that require strong piezoelectric performance," said John West, deputy director of manufacturing and global supply chain at Yole Group. "Pulsus is an innovative solution to help optimize specialty devices now and advance technology roadmaps for varied applications to come."

The PLD capabilities of Pulsus, supported by Lam's 2300 platform design, ensure exceptional film uniformity and quality at a fraction of the cost per wafer versus conventional deposition methods. This efficiency can help chipmakers boost manufacturing yields and accelerate their product roadmaps.

In addition to AlScN, Pulsus can deposit a wide range of complex, multi-element materials that cannot be applied by other methods. Lam is exploring new materials to meet the demands of the specialty technology market for applications such as AR/VR and quantum computing.

"The Pulsus PLD system is unique in its ability to deposit numerous materials, including AlScN, with outstanding thin film properties," said Sothachett Van, head of investment and supplier partnership group, CEA-Leti. "We are excited to see this technology mature into a high-volume manufacturing solution for piezoelectric MEMS devices."

Learn more at www.lamresearch.com.

Media Resources

• Visit the Lam Newsroom to access related images.
• Read the Lam blog.
• Learn more about the Pulsus PLD system.

About Lam Research
Lam Research Corporation is a global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Lam's equipment and services allow customers to build smaller and better performing devices. In fact, today, nearly every advanced chip is built with Lam technology. We combine superior systems engineering, technology leadership, and a strong values-based culture, with an unwavering commitment to our customers. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company headquartered in Fremont, Calif., with operations around the globe. Learn more at www.lamresearch.com.

Caution Regarding Forward-Looking Statements
Statements made in this press release that are not of historical fact are forward-looking statements and are subject to the safe harbor provisions of the Private Securities Litigation Reform Act of 1995. Such forward-looking statements relate to but are not limited to: market and industry expectations and the performance of the Pulsus system. Some factors that may affect these forward-looking statements include: trade regulations, export controls, trade disputes, and other geopolitical tensions may inhibit our ability to sell our products; business, political and/or regulatory conditions in the consumer electronics industry, the semiconductor industry and the overall economy may deteriorate or change; the actions of our customers and competitors may be inconsistent with our expectations; supply chain cost increases and other inflationary pressures have impacted and are expected to continue to impact our profitability; supply chain disruptions have limited and are expected to continue to limit our ability to meet demand for our products; and natural and human-caused disasters, disease outbreaks, war, terrorism, political or governmental unrest or instability, or other events beyond our control may impact our operations and revenue in affected areas; as well as the other risks and uncertainties that are described in the documents filed or furnished by us with the Securities and Exchange Commission, including specifically the Risk Factors described in our annual report on Form 10-K for the fiscal year ended June 25, 2023 and quarterly report on Form 10-Q for the fiscal quarter ended December 24, 2023. These uncertainties and changes could materially affect the forward-looking statements and cause actual results to vary from expectations in a material way. The Company undertakes no obligation to update the information or statements made in this press release.

Company Contacts:
Allison L. Parker
Media Relations
(510) 572-9324
publicrelations@lamresearch.com

Ram Ganesh
Investor Relations
(510) 572-1615
investor.relations@lamresearch.com

Source: Lam Research Corporation, (Nasdaq: LRCX)

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SOURCE Lam Research Corporation

What is the significance of Lam Research Corp.'s Pulsus PLD system introduction?

Lam Research Corp. has introduced the Pulsus PLD system, a groundbreaking technology for advanced MEMS-based microphones and RF filters, enhancing device performance.

What does the Pulsus PLD system deliver?

The Pulsus PLD system delivers high scandium content films, optimizing RF filters and MEMS microphones.

How does Pulsus benefit specialty technologies?

Pulsus offers unique benefits for specialty technologies by enabling efficient manufacturing and material deposition.

What are the key features of Pulsus PLD system?

The Pulsus PLD system offers exceptional film uniformity and quality at a fraction of the cost per wafer compared to conventional deposition methods.

Who collaborated with Lam Research Corp. for the Pulsus PLD system?

Lam Research Corp. collaborated with CEA-Leti for the Pulsus PLD system.