Here are the DEF 14A proxy statements from Axcelis Technologies Inc (ACLS) in our archive over the last 12 months, newest first, and each one links through to the document itself with the summary and the scores our analysis gives it.
A DEF 14A covers the proxy statement, with executive pay and the shareholder votes, so if you follow ACLS and want that one kind of document rather than the whole filing history, this is the page to keep. The company's other filings, of every form, are on the full ACLS filings page.
Axcelis Technologies is asking stockholders to vote at its May 5, 2026 annual meeting on three main items: electing eight directors, ratifying Ernst & Young LLP as independent auditor for 2026, and approving 2025 executive compensation in an advisory Say-on-Pay vote.
Only holders of the 30,729,970 shares outstanding as of March 12, 2026 may vote, with one vote per share. The proxy details strong prior support, including 92.67% average director support and 87.1% backing for 2024 pay in 2025. It highlights 2025 results of $839 million in revenue and $3.80 diluted EPS, an 18% revenue decline but improved margins, 14% growth in Customer Solutions & Innovation revenue, and a focus on power device tools, which were 54% of 2025 system shipment value.
Executive pay remains heavily performance-based: the 2025 team incentive funded at 103.1% of target and performance-based RSUs earned at 112.5% of target, leading to realized CEO pay at about 104% of 2025 target and other named executives averaging about 102%.