Welcome to our dedicated page for Onto Innovation SEC filings (Ticker: ONTO), a comprehensive resource for investors and traders seeking official regulatory documents including 10-K annual reports, 10-Q quarterly earnings, 8-K material events, and insider trading forms.
Onto Innovation Inc. (NYSE: ONTO) files a range of documents with the U.S. Securities and Exchange Commission that provide detailed insight into its semiconductor process control business. As a supplier of metrology, defect inspection, lithography and analytics systems to microelectronics device manufacturers, the company uses its SEC filings to describe its single operating segment, technology portfolio, geographic footprint and risk factors.
On this page, you can review Current Reports on Form 8‑K in which Onto Innovation reports material events. Recent 8‑K filings include disclosures about the agreement to acquire, and subsequent completion of the acquisition of, Semilab USA LLC, including the Equity Purchase Agreement, an amendment to that agreement and the mix of cash and common stock used as consideration. Other 8‑Ks furnish quarterly earnings releases, outlining revenue, margins, non‑GAAP measures and financial outlook, along with cautionary statements about forward‑looking information.
Onto Innovation also uses 8‑K and 8‑K/A filings to describe executive and governance‑related matters, such as the adoption of the Onto Innovation Nonqualified Deferred Compensation Plan and the material terms of a separation agreement with a former chief financial officer. These documents detail plan eligibility, deferral elections, vesting and distribution options, as well as severance payments and equity award treatment.
Through Stock Titan, investors can access Onto Innovation’s SEC filings as they are posted to EDGAR and use AI‑powered summaries to interpret complex disclosures. Long‑form documents such as annual reports on Form 10‑K and quarterly reports on Form 10‑Q, when available, can be analyzed for information on process control technologies, geographic operations, risk factors and non‑GAAP adjustments, while Form 4 and other insider transaction reports can be monitored to track equity activity by directors and officers.
ROBERTS BRIAN K reported acquisition or exercise transactions in this Form 4 filing.
Onto Innovation Inc. Chief Financial Officer Brian K. Roberts reported equity award grants on March 2, 2026. He received 3,096 shares of common stock and new awards of performance stock units, all at a stated price of $0.00 per share as compensation.
The common stock grant and RSUs vest in three equal annual installments over three years from the award date. The performance stock units represent a target number of shares, with actual vesting ranging from 0% to 200% based on performance criteria over the award period.
Onto Innovation Inc. executive vice president Ido Dolev reported routine equity compensation and related tax withholding. On March 2, he received a grant of 3,440 shares of common stock and two performance stock unit awards of 1,720 units each, all at a stated price of $0.00 per unit. The performance stock units represent target awards that may ultimately vest between 0% and 200% based on performance criteria. On March 3, 819 shares of common stock valued at $207.50 per share were withheld to cover tax obligations tied to previously granted restricted or performance stock units, leaving him with 26,536 common shares held directly.
Onto Innovation Inc. Chief Operating Officer Ramil Yaldaei received several equity awards and had shares withheld to cover taxes. On March 2, he was granted 7,683 shares of common stock and two awards of 1,548 performance stock units each, all at a stated price of $0.00 per unit as part of compensation. On March 3, 615 shares of common stock at $207.50 per share were withheld to satisfy tax obligations tied to prior RSU or PSU vesting, leaving him with 18,436 common shares held directly. The RSUs vest in three equal annual installments, while the performance stock units can ultimately vest between 0% and 200% of the target amount based on specified performance criteria.
ONTO Innovation Inc. Chief Executive Officer Michael P. Plisinski reported equity compensation and a related tax-withholding share disposition. He received a grant of 14,479 shares of common stock and two separate performance stock unit awards of 7,239 units each, all at a stated price of $0.00 per unit. The restricted stock units vest in three equal annual installments, while the performance stock units can vest between 0% and 200% of the target amount based on performance criteria. To cover tax obligations from vesting of prior awards, 3,742 common shares were withheld at $207.50 per share, leaving him with 179,242 common shares held directly.
ONTO Innovation senior vice president and general counsel Yoon Ah Oh received equity awards and had shares withheld for taxes. On March 2, she was granted 2,408 shares of common stock as restricted stock units that vest in equal one-third installments over three years, plus two performance stock unit awards of 1,204 units each, with actual vesting between 0% and 200% of the target amount based on performance criteria. On March 3, 417 common shares were withheld at $207.50 per share to satisfy tax withholding obligations tied to previously granted RSU or PSU awards, leaving her with 21,640 common shares directly owned afterward.
Chen Shirley reported acquisition or exercise transactions in this Form 4 filing.
Onto Innovation SVP Customer Success Shirley Chen reported equity awards that increase her direct ownership stake. On March 2, 2026, she received grants of performance stock units and 2,523 shares of common stock at a grant price of $0.00 per share.
The common stock grant is structured as restricted stock units that vest in three equal annual installments over three years from the award date. The performance stock units represent a target number of shares, with the actual amount that vests ranging from 0% to 200% based on specified performance criteria over the award period.
Onto Innovation Inc. Chief Operating Officer Ramil Yaldaei reported equity award activity tied to performance and tax withholding. On March 1, 2026, performance stock units granted on March 1, 2024 settled in common shares after performance criteria were met at 77% of target. Some of the resulting shares were automatically withheld by the company at a price of $215.89 per share to cover tax obligations, rather than being sold on the open market. After these settlement and withholding transactions, Yaldaei directly owned 11,368 shares of Onto Innovation common stock.
Onto Innovation Inc. Chief Executive Officer Michael P. Plisinski reported equity award activity tied to performance stock units and related tax withholding. On March 1, 2026, 5,971 performance stock units granted on March 1, 2024 settled into 4,597 shares of common stock at a stated price of $0.0000 per share after performance criteria were achieved at 77% of target. To cover tax withholding obligations from these and other equity awards, 2,222 and 1,925 shares of common stock were disposed of at $215.89 per share through share withholding rather than open-market sales. Following these transactions, Plisinski directly owned 168,505 shares of Onto Innovation common stock.
Onto Innovation Inc. senior vice president and general counsel Yoon Ah Oh reported equity award activity. On March 1, 2026, 941 performance stock units vested and were settled, resulting in the acquisition of 724 shares of common stock at a stated price of $0.00 per share.
On the same date, 307 shares and 267 shares of common stock were withheld at $215.89 per share to cover tax obligations tied to the vesting of restricted or performance stock units, rather than open-market sales. After these transactions, Yoon Ah Oh directly owned 19,649 common shares.
Onto Innovation Inc. files its annual report describing a global business focused on metrology, inspection, lithography and process-control software for semiconductor and advanced packaging markets. Customers include leading chip and wafer manufacturers, with notable exposure to advanced logic, memory, power devices and AI-driven applications.
The company expands its portfolio through the late-2025 acquisition of Semilab USA, adding contamination, materials characterization and infrared metrology product lines. Onto highlights a concentrated customer base, complex global supply chains, export-control headwinds in China, and competitive pressure from large rivals. It also emphasizes significant ongoing R&D, 423 granted patents and 1,615 employees supporting worldwide operations.