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Onto Innovation Inc. filings document material-event reporting, operating results and governance for a semiconductor process-control equipment company. Form 8-K disclosures record earnings releases, preliminary revenue estimates, guidance, material agreements and product-related business updates involving Dragonfly® inspection systems, 3Di™ metrology and advanced packaging applications.
Proxy materials describe governance matters, executive compensation, pay-versus-performance disclosures and shareholder voting matters. Other current reports address compensatory arrangements such as the Onto Innovation Nonqualified Deferred Compensation Plan, capital-structure disclosures and completed corporate actions, including acquisitions of selected materials-analysis product lines.
Onto Innovation Inc. Chief Operating Officer Ramil Yaldaei received several equity awards and had shares withheld to cover taxes. On March 2, he was granted 7,683 shares of common stock and two awards of 1,548 performance stock units each, all at a stated price of $0.00 per unit as part of compensation. On March 3, 615 shares of common stock at $207.50 per share were withheld to satisfy tax obligations tied to prior RSU or PSU vesting, leaving him with 18,436 common shares held directly. The RSUs vest in three equal annual installments, while the performance stock units can ultimately vest between 0% and 200% of the target amount based on specified performance criteria.
ONTO Innovation Inc. Chief Executive Officer Michael P. Plisinski reported equity compensation and a related tax-withholding share disposition. He received a grant of 14,479 shares of common stock and two separate performance stock unit awards of 7,239 units each, all at a stated price of $0.00 per unit. The restricted stock units vest in three equal annual installments, while the performance stock units can vest between 0% and 200% of the target amount based on performance criteria. To cover tax obligations from vesting of prior awards, 3,742 common shares were withheld at $207.50 per share, leaving him with 179,242 common shares held directly.
ONTO Innovation senior vice president and general counsel Yoon Ah Oh received equity awards and had shares withheld for taxes. On March 2, she was granted 2,408 shares of common stock as restricted stock units that vest in equal one-third installments over three years, plus two performance stock unit awards of 1,204 units each, with actual vesting between 0% and 200% of the target amount based on performance criteria. On March 3, 417 common shares were withheld at $207.50 per share to satisfy tax withholding obligations tied to previously granted RSU or PSU awards, leaving her with 21,640 common shares directly owned afterward.
Chen Shirley reported acquisition or exercise transactions in this Form 4 filing.
Onto Innovation SVP Customer Success Shirley Chen reported equity awards that increase her direct ownership stake. On March 2, 2026, she received grants of performance stock units and 2,523 shares of common stock at a grant price of $0.00 per share.
The common stock grant is structured as restricted stock units that vest in three equal annual installments over three years from the award date. The performance stock units represent a target number of shares, with the actual amount that vests ranging from 0% to 200% based on specified performance criteria over the award period.
Onto Innovation Inc. Chief Operating Officer Ramil Yaldaei reported equity award activity tied to performance and tax withholding. On March 1, 2026, performance stock units granted on March 1, 2024 settled in common shares after performance criteria were met at 77% of target. Some of the resulting shares were automatically withheld by the company at a price of $215.89 per share to cover tax obligations, rather than being sold on the open market. After these settlement and withholding transactions, Yaldaei directly owned 11,368 shares of Onto Innovation common stock.
Onto Innovation Inc. Chief Executive Officer Michael P. Plisinski reported equity award activity tied to performance stock units and related tax withholding. On March 1, 2026, 5,971 performance stock units granted on March 1, 2024 settled into 4,597 shares of common stock at a stated price of $0.0000 per share after performance criteria were achieved at 77% of target. To cover tax withholding obligations from these and other equity awards, 2,222 and 1,925 shares of common stock were disposed of at $215.89 per share through share withholding rather than open-market sales. Following these transactions, Plisinski directly owned 168,505 shares of Onto Innovation common stock.
Onto Innovation Inc. senior vice president and general counsel Yoon Ah Oh reported equity award activity. On March 1, 2026, 941 performance stock units vested and were settled, resulting in the acquisition of 724 shares of common stock at a stated price of $0.00 per share.
On the same date, 307 shares and 267 shares of common stock were withheld at $215.89 per share to cover tax obligations tied to the vesting of restricted or performance stock units, rather than open-market sales. After these transactions, Yoon Ah Oh directly owned 19,649 common shares.
Onto Innovation Inc. files its annual report describing a global business focused on metrology, inspection, lithography and process-control software for semiconductor and advanced packaging markets. Customers include leading chip and wafer manufacturers, with notable exposure to advanced logic, memory, power devices and AI-driven applications.
The company expands its portfolio through the late-2025 acquisition of Semilab USA, adding contamination, materials characterization and infrared metrology product lines. Onto highlights a concentrated customer base, complex global supply chains, export-control headwinds in China, and competitive pressure from large rivals. It also emphasizes significant ongoing R&D, 423 granted patents and 1,615 employees supporting worldwide operations.
Onto Innovation Inc. reported record revenue for both the 2025 fourth quarter and full year, reflecting steady demand for its semiconductor process control tools. Fourth-quarter revenue was $266.9 million, up 1.1% from 2024, while full-year revenue reached $1.005 billion, 1.8% higher than the prior year.
Profitability declined on a GAAP basis, with Q4 gross margin at 46.4% and diluted earnings per share at $0.21, down from $0.98 a year earlier, mainly due to higher amortization and restructuring costs. Non-GAAP diluted EPS was $1.26 versus $1.51 in Q4 2024. The company generated about $95 million in Q4 operating cash flow and ended the year with $639.6 million in cash and short-term investments. Onto completed the acquisition of key product lines from Semilab International and signed a volume purchase agreement estimated at over $240 million for its Dragonfly® systems. For the first quarter of 2026, it guides revenue of $275–$285 million and non-GAAP diluted EPS of $1.26–$1.36, with non-GAAP operating margin of 25.5%–26.5%.
Onto Innovation Inc.'s Chief Executive Officer Michael P. Plisinski reported equity award activity on common stock. On February 14, 2026, performance stock units granted on February 14, 2023 settled into 18,445 shares of common stock after performance criteria were achieved at 156% of target.
To cover tax withholding obligations tied to this PSU and other equity vesting, 8,919 shares and 3,632 shares of common stock were withheld by the issuer at a price of $217.23 per share. Following these transactions, Plisinski directly owned 168,055 common shares.