Entegris Achieves Further Success in Defending Its CMP Slurry Patent Portfolio

Key Terms

chemical mechanical planarization technical

Chemical mechanical planarization is a manufacturing step in semiconductor production that polishes and smooths the surface of silicon wafers so the layers built on them are even and defect-free — think of sanding and polishing a tabletop so paint goes on smoothly. For investors, it matters because this process directly affects chip yield, performance and cost: better planarization improves production efficiency and enables more advanced, profitable chips, while equipment and consumables represent significant capital and recurring expenses.

colloidal silica slurry technical

A colloidal silica slurry is a stable liquid suspension of very small silica (silicon dioxide) particles dispersed in water or another solvent; the nanoparticles are kept from settling by surface chemistry so the mixture behaves like a uniform liquid. It matters to investors because this engineered “fine silt” is a critical input in precision manufacturing and processing—used for chemical-mechanical polishing in semiconductors, coatings, catalysts and some pharmaceutical formulations—so its demand, quality and supply can influence costs and revenues across industrial and tech companies.

exclusion order regulatory

An exclusion order is a government directive that bars specific products from entering or being sold in a market because they violate laws or regulations, most often intellectual property or import rules. For investors, it matters because it can suddenly cut a company’s sales or remove competitors’ products from shelves—like a referee stopping a player from rejoining a game, it changes who can compete and where revenue can flow.

cease and desist orders regulatory

A cease and desist order is an official instruction from a regulator, court, or other authority telling a company or individual to stop a specific activity immediately and to refrain from repeating it, similar to a stop sign enforced by law. For investors, such an order can halt product sales or operations, harm reputation, trigger fines or lawsuits, and create uncertainty that may reduce revenue and depress a company’s stock price.

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BILLERICA, Mass.--(BUSINESS WIRE)-- Entegris, Inc. (Nasdaq: ENTG), a leading supplier of critical advanced materials and process solutions for the semiconductor and other high-technology industries, today announced recent decisions in Taiwan and China upholding patents covering key Entegris colloidal silica slurry technology used in chemical mechanical planarization (CMP) applications. The decisions further reinforce the strength of Entegris’s global intellectual property portfolio and underscore the Company’s technology leadership in advanced CMP slurries for semiconductor manufacturing.

On July 14, 2026, the Taiwan Intellectual Property and Commercial Court rejected a challenge by an affiliate of Qnity Electronics, Inc. (“Qnity”) and upheld the validity of Taiwan Patent No. I561622. On August 10, 2026, China’s National Intellectual Property Administration likewise rejected a challenge by a Qnity affiliate and upheld the validity of Chinese Patent No. 107075343B. Both patents relate to acidic colloidal silica slurry technology.

These decisions follow Entegris’s prior enforcement success involving the same patent family. In 2021, the U.S. International Trade Commission (ITC) found that Qnity’s Optiplane CMP slurry products infringed U.S. Patent No. 9,499,721 and issued exclusion and cease and desist orders prohibiting the importation, marketing, and sale in the United States of Qnity’s infringing products. In 2024, Entegris resolved related U.S. district court litigation concerning the same Optiplane products. The resolution maintained the exclusion order and cease and desist orders granted by the ITC, which remain in force until 2035.

“Entegris’s technology leadership is built on decades of innovation that enables the semiconductor industry’s most critical manufacturing processes” said Olivier Blachier, President, Materials Solutions and Senior Vice President, Chief Innovation Officer of Entegris. “These decisions reinforce the strength of our intellectual property and our commitment to protecting the innovations that differentiate Entegris, strengthen our competitive position, and support long-term value creation for customers and shareholders.”

ABOUT ENTEGRIS

Entegris is a leading supplier of critical advanced materials and process solutions for the semiconductor and other high-tech industries. Entegris has approximately 7,700 employees throughout its global operations and is ISO 9001 certified. It has manufacturing, customer service and/or research facilities in the United States, Canada, China, Germany, Israel, Japan, Malaysia, Singapore, South Korea, and Taiwan. Additional information can be found at www.entegris.com.

CAUTIONARY NOTE ON FORWARD-LOOKING STATEMENTS

This news release contains “forward-looking statements.” The words “believe,” “expect,” “anticipate,” “intend,” “estimate,” “forecast,” “project,” “should,” “may,” “will,” “would” or the negative thereof and similar expressions are intended to identify such forward-looking statements. These forward-looking statements include, but are not limited to, those related to the strength and enforceability of the Company’s intellectual property portfolio, the Company’s technology leadership and competitive position and the ability to protect the Company’s innovations. They are not guarantees of future performance and they involve substantial risks and uncertainties that are difficult to predict, including, but not limited to, those identified in the risk factors and additional information described in the Company’s Annual Report on Form 10-K for the fiscal year ended December 31, 2025, filed with the Securities and Exchange Commission (the “SEC”) on February 11, 2026, including under the heading “Risk Factors” in Item 1A, and in the Company’s other periodic filings with the SEC. Except as required under the federal securities laws and the rules and regulations of the SEC, Entegris undertakes no obligation to update publicly any forward-looking statements or information contained herein, which speak as of their respective dates.

View source version on businesswire.com: https://www.businesswire.com/news/home/20260818175989/en/

Investor Contact:
Jeffrey Schnell
Vice President, Investor Relations
+ 1 201 207 3029
jeffrey.schnell@entegris.com

Media Contact:
Jessica Emond
Senior Director, Global Corporate Communications
+1 978 436 6520
jessica.emond@entegris.com

Source: Entegris, Inc.