[ARS] AXCELIS TECHNOLOGIES INC SEC Filing Filing Impact (Low) Filing Sentiment (Neutral) Form Type ARS AI-generated analysis. How Rhea-AI works. Not financial advice. See more from StockTitan in Google Search and AI answers. Adds StockTitan as a preferred source · opens Google Add on Google Not now Accepted by SEC EDGAR 03/31/2026 - 07:33 AM Learn about SEC filing dates ⛶ Fullscreen ARS - AXCELIS TECHNOLOGIES INC ARS Filing - AXCELIS TECHNOLOGIES INC This filing is available as a PDF document. Filing Type: ARS Company: AXCELIS TECHNOLOGIES INC (ACLS) Acceptance Date: 2026-03-31T07:33:54.000Z View PDF Document Source: View Original Filing on SEC EDGAR