[ARS] AXCELIS TECHNOLOGIES INC SEC Filing Filing Impact (Low) Filing Sentiment (Neutral) Form Type ARS 03/31/2026 - 07:33 AM ⛶ Fullscreen ARS - AXCELIS TECHNOLOGIES INC ARS Filing - AXCELIS TECHNOLOGIES INC This filing is available as a PDF document. Filing Type: ARS Company: AXCELIS TECHNOLOGIES INC (ACLS) Acceptance Date: 2026-03-31T07:33:54.000Z View PDF Document Source: View Original Filing on SEC EDGAR