Axcelis Technologies (ACLS) EVP awarded 1,734 RSUs vesting 2027-30

Rhea-AI Filing Summary

Axcelis Technologies EVP Global Operations Robert John Mahoney reported a new equity award. On January 15, 2026, he acquired 1,734 shares of common stock at a price of $0, reflecting restricted stock units granted under the company’s 2012 Equity Incentive Plan. These units are scheduled to vest in four equal 25% installments on January 15 of 2027, 2028, 2029, and 2030, assuming his employment continues.

Following this grant, Mahoney beneficially owned 15,206 shares of Axcelis common stock. Of this amount, 11,611 shares were issuable upon vesting of previously granted restricted stock units and remain subject to forfeiture under the plan’s terms.

Insider Trade Summary

1 transaction reported

Mixed 1 txn

Insider Mahoney Robert John

Role EVP Global Operations

Type	Security	Shares	Price	Value
Grant/Award	Common Stock	1,734	$0.00	--

Holdings After Transaction: Common Stock — 15,206 shares (Direct)

Footnotes (1)

1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on January 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of January 15, 2027, January 15, 2028, January 15, 2029, and January 15, 2030. Of the shares held after this grant on January 15, 2026, 11,611 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Form 4 Insider Transactions: What Each Field Means →

SEC Form 4

FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

OMB APPROVAL

OMB Number:			3235-0287
Estimated average burden
hours per response:			0.5

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

Check this box to indicate that a transaction was made pursuant to a contract, instruction or written plan for the purchase or sale of equity securities of the issuer that is intended to satisfy the affirmative defense conditions of Rule 10b5-1(c). See Instruction 10.

1. Name and Address of Reporting Person^*

Mahoney Robert John

(Last) (First) (Middle)

108 CHERRY HILL DRIVE

(Street)

BEVERLY MA 01915

(City) (State) (Zip)

2. Issuer Name and Ticker or Trading Symbol
AXCELIS TECHNOLOGIES INC [ ACLS ]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

	Director		10% Owner
X	Officer (give title below)		Other (specify below)
	EVP Global Operations

3. Date of Earliest Transaction (Month/Day/Year)
01/15/2026

4. If Amendment, Date of Original Filed (Month/Day/Year)

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	01/15/2026		A		1,734	A	$0(1)	15,206(2)	D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:

1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on January 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of January 15, 2027, January 15, 2028, January 15, 2029, and January 15, 2030.

2. Of the shares held after this grant on January 15, 2026, 11,611 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

	/s/ Eileen J. Evans, Attorney-in-Fact	01/16/2026
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.

FAQ

What insider transaction did ACLS EVP Robert John Mahoney report?

Robert John Mahoney, EVP Global Operations at Axcelis Technologies, reported the acquisition of 1,734 shares of common stock on January 15, 2026 through a grant of restricted stock units.

At what price were the 1,734 Axcelis (ACLS) shares acquired in this Form 4?

The 1,734 shares reported by Robert John Mahoney were acquired at a stated price of $0 per share, consistent with a restricted stock unit award rather than an open-market purchase.

What is the vesting schedule for the new restricted stock units reported by ACLS?

The restricted stock units granted on January 15, 2026 will vest as to 25% of the shares on each of January 15, 2027, January 15, 2028, January 15, 2029, and January 15, 2030, assuming continued employment.

How many Axcelis shares does Robert John Mahoney own after this Form 4 transaction?

After the reported grant on January 15, 2026, Robert John Mahoney beneficially owned 15,206 shares of Axcelis Technologies common stock in total.

How many of Mahoney’s ACLS shares are still unvested and subject to forfeiture?

Of the shares held after the January 15, 2026 grant, 11,611 shares were issuable on vesting of restricted stock units previously granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

What equity plan governs the restricted stock units reported in this Axcelis Form 4?

The restricted stock units reported by Robert John Mahoney were granted under Axcelis Technologies’ 2012 Equity Incentive Plan.