Advanced Energy Unveils Centra Smart Hub for Improved Temperature Measurement in Next-Generation Semiconductor Tools
Advanced Energy Industries (AEIS) launched its Centra Smart Hub for semiconductor-tool temperature measurement at SEMICON West in San Francisco.
Sentiment and the balance of points
Rhea-AI Sentiment reads the wording of the document, how positive or negative its language is on a 1 to 5 scale. The balance of points shown with the takes weighs what the document actually discloses, so the two can disagree, for example when a trial that missed its main goal is described in upbeat language.
New Centralized Hub Supports up to Eight Sensors for Precise, Repeatable, Non-Contact Temperature Measurement in Space-Constrained Semiconductor Equipment
The Centra Smart Hub, combined with Advanced Energy’s new Remote Smart Sensors (RSS), enables more accurate wafer-temperature measurement and real-time temperature control for many lamp-heated Si and SiC thermal processes, such as rapid thermal annealing (RTA) and Epitaxial (Epi) growth. The result is a comprehensive, customizable solution that delivers industry-leading performance, with up to a
The Centra Smart Hub, combined with Advanced Energy’s new Remote Smart Sensors (RSS), enables more accurate wafer-temperature measurement and real-time temperature control for many lamp-heated Si and SiC thermal processes, such as rapid thermal annealing (RTA) and Epitaxial (Epi) growth.
The result is a comprehensive, customizable solution that delivers industry-leading performance, with up to a
“Advanced Energy’s new Centra Smart Hub and Remote Smart Sensors deliver industry-leading performance to meet today’s process requirements along with a new architecture for semiconductor processing systems,” said Juergen Braun, Executive Vice President of Plasma Power at Advanced Energy. “The Centra Smart Hub enables temperature measurement for Si and SiC processes to help fabs improve wafer-to-wafer repeatability and thermal uniformity for higher yields.”
Many of these processes rely on infrared (IR) lamp heating, which can challenge traditional pyrometers, many of which operate in the short- and near-IR measurement wavelengths. The strong thermal signal from IR lamps can “flood” or saturate traditional near-IR pyrometers, making them unsuitable for wafer measurement. For this reason, measuring at a different wavelength can avoid the strong IR signal produced by the lamps and reduce its effect on the detected temperature.
Centra's hub-and-spoke architecture has been optimized for semiconductor chambers. The Centra Smart Hub is placed in an instrument rack and connected to the RSS. The RSS is installed directly on the chamber and provides multiple measurement points across the wafer in ambient temperatures of up to 60°C.
See product specifications and more information here.
About Advanced Energy
Advanced Energy (Nasdaq: AEIS) is a global leader in the design and manufacturing of highly engineered, precision power conversion, measurement, and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex applications for a wide range of industries including semiconductor equipment, industrial, manufacturing, telecommunications, data center computing, and healthcare. With engineering know-how and responsive worldwide service and support, the company builds collaborative partnerships to meet evolving technology requirements, drive customer growth, and innovate the future of power. Advanced Energy has devoted more than four decades to perfecting power for its global customers and is headquartered in Denver, Colorado, USA.
Advanced Energy | Precision. Power. Performance. Trust.
View source version on businesswire.com: https://www.businesswire.com/news/home/20261013801811/en/
Media Contacts
Christine Romero
Advanced Energy
Media@aei.com
Emma Jenkins
Grand Bridges for Advanced Energy
aei@grandbridges.com
+1 415 800 4529
Source: Advanced Energy Industries Inc.