Axcelis Technologies (ACLS) EVP reports RSU vesting and 1,378-share tax withholding

Rhea-AI Filing Summary

Axcelis Technologies Inc. executive reports tax-related share withholding. An executive officer of Axcelis Technologies Inc. reported a Form 4 transaction dated December 16, 2025. In connection with the vesting of 2,850 service-vesting restricted stock units granted in December 2024, 1,378 shares of common stock were withheld to cover tax obligations. The withholding price was based on the $86.32 closing price of Axcelis common stock on the withholding date. After this event, the reporting person beneficially owned 24,406 shares of common stock, including 22,934 shares issuable upon vesting of restricted stock units under the company’s 2012 Equity Incentive Plan that remain subject to forfeiture.

SEC Form 4

FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

OMB APPROVAL

OMB Number:			3235-0287
Estimated average burden
hours per response:			0.5

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

Check this box to indicate that a transaction was made pursuant to a contract, instruction or written plan for the purchase or sale of equity securities of the issuer that is intended to satisfy the affirmative defense conditions of Rule 10b5-1(c). See Instruction 10.

1. Name and Address of Reporting Person^*

Evans Eileen

(Last) (First) (Middle)

108 CHERRY HILL DRIVE

(Street)

BEVERLY MA 01915

(City) (State) (Zip)

2. Issuer Name and Ticker or Trading Symbol
AXCELIS TECHNOLOGIES INC [ ACLS ]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

	Director		10% Owner
X	Officer (give title below)		Other (specify below)
	EVP, General Counsel and Sec'y

3. Date of Earliest Transaction (Month/Day/Year)
12/16/2025

4. If Amendment, Date of Original Filed (Month/Day/Year)

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	12/16/2025		F		1,378	D(1)	$86.32(2)	24,406(3)	D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:

1. This forfeiture of shares for tax withholding purposes relates to the vesting on December 16, 2025 of 2,850 service vesting restricted stock units granted to the executive in December 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

2. Represents the closing price of the common stock on the date of the tax withholding.

3. Of the shares held after this vesting event on December 16, 2025, 22,934 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

	/s/ Eileen J. Evans	12/18/2025
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.

FAQ

What insider transaction did Axcelis Technologies (ACLS) report on this Form 4?

The filing reports that an Axcelis Technologies executive had 1,378 shares of common stock withheld on December 16, 2025 to satisfy tax obligations related to vesting restricted stock units.

Who is the reporting person in the Axcelis Technologies (ACLS) Form 4 and what is their role?

The reporting person is an officer of Axcelis Technologies Inc., serving as EVP, General Counsel and Secretary.

What equity award vested for the Axcelis Technologies (ACLS) executive on December 16, 2025?

The executive had 2,850 service-vesting restricted stock units vested on December 16, 2025, originally granted in December 2024.

Why were 1,378 Axcelis Technologies (ACLS) shares forfeited in this Form 4?

The 1,378 shares were forfeited for tax withholding purposes. The number of shares issued on vesting was reduced by shares equal in value to the executive’s tax withholding obligation.

What price was used to value Axcelis Technologies (ACLS) shares for the tax withholding?

The shares withheld for tax purposes were valued at $86.32 per share, which represents the closing price of Axcelis common stock on the tax withholding date.

How many Axcelis Technologies (ACLS) shares does the executive beneficially own after this transaction?

Following the reported transaction, the executive beneficially owned 24,406 shares of Axcelis common stock, of which 22,934 shares are issuable upon vesting of restricted stock units under the 2012 Equity Incentive Plan and remain subject to forfeiture.

Is this Axcelis Technologies (ACLS) Form 4 filed for one or multiple reporting persons?

The Form 4 is indicated as being filed by one reporting person, not by a group.