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Axcelis Technologies, Inc. reported the results of its 2026 annual meeting of stockholders held in Beverly, Massachusetts. Of 30,729,970 common shares eligible to vote as of March 12, 2026, 27,730,608 shares, or 90.24%, were represented in person or by proxy.
Stockholders elected eight director nominees, each receiving between 88.16% and 98.73% of votes cast in favor. They also ratified the appointment of Ernst & Young LLP as independent registered public accounting firm for the year ending December 31, 2026, with 91.82% of votes cast in favor.
In an advisory vote on executive compensation for 2025, stockholders approved the pay of the named executive officers, with 90.56% of votes cast in favor, 2,381,859 votes against, and 51,140 abstentions, plus 2,436,760 broker non-votes.
Axcelis Technologies Inc ownership filing: FMR LLC reports beneficial ownership of 2,431,120.88 shares of Common Stock, representing 7.9% of the class as of 03/31/2026. The filing lists sole voting power of 2,421,135 and sole dispositive power of 2,431,120.88.
Axcelis Technologies Inc. president and CEO Russell Low reported an open-market sale of 1,244 shares of common stock at $138.86 per share on May 1, 2026. The transaction was executed under a pre-arranged Rule 10b5-1 trading plan adopted on December 11, 2025.
After this sale, Low directly held 131,038 shares of Axcelis common stock. Of this amount, 83,480 shares were issuable upon vesting of restricted stock units granted under the company’s 2012 Equity Incentive Plan and remain subject to forfeiture.
Russell Low filed a Form 144 reporting proposed sales of Common stock under 10b5-1 arrangements. The excerpt lists transactions dated 03/24/2026 and 04/01/2026 with amounts shown as 111960.00 and 117010.64 respectively. The securities section references Restricted Stock Units dated 02/28/2023.
Axcelis Technologies Inc reported that Vanguard Capital Management beneficially owns 1,617,321 shares of common stock, representing 5.26% of the class. The filing shows Vanguard has sole dispositive power over 1,617,321 shares and sole voting power for 234,551 shares. The disclosure is signed by the Head of Global Fund Administration and filed on 04/29/2026.
Axcelis Technologies Inc reported that Vanguard Portfolio Management beneficially owns 2,501,359 shares of common stock, representing 8.14% of the class as of 03/31/2026. The filing states Vanguard has sole voting power over 13,066 shares and sole dispositive power over 2,501,359 shares, and describes ownership as held across Vanguard affiliates and client accounts.
Axcelis Technologies executive Christopher Tatnall had 907 shares of common stock withheld for taxes in connection with restricted stock units vesting. The tax withholding was valued at $131.02 per share, based on the closing price on the withholding date.
After this vesting and tax withholding, Tatnall directly holds 23,044 shares, including 16,463 shares issuable upon vesting of restricted stock units that remain subject to forfeiture under the company’s 2012 Equity Incentive Plan.
Axcelis Technologies president and CEO Russell Low executed an open-market sale of 1,244 shares of common stock at $94.06 per share on April 1, 2026. The transaction was made under a pre-arranged Rule 10b5-1 trading plan adopted on December 11, 2025.
Following this sale, Low directly holds 132,282 shares of Axcelis common stock. Of these, 83,480 shares are issuable upon vesting of restricted stock units granted under the 2012 Equity Incentive Plan and remain subject to forfeiture.
ACLS affiliate filed a Section 144 notice reporting the proposed sale of 1,244 shares of Common Stock. The filing references Restricted Stock Units granted 02/28/2023 and a 10b5-1 sale executed 03/24/2026 that lists $111,960.00. The filing date shown is 04/01/2026.