Axcelis Technologies filings document the formal disclosures of a semiconductor equipment company focused on ion implantation systems and lifecycle support. Its Form 8-K reports cover operating results, material events, financial-condition updates, executive officer changes and annual-meeting voting results.
Proxy materials describe board elections, stockholder voting mechanics, independent auditor ratification, executive compensation and share ownership by directors, officers and significant holders. The filing record also includes disclosures related to material agreements, governance matters and capital-structure subjects tied to the company’s common stock and public-company reporting obligations.
Axcelis Technologies Inc reported that Vanguard Capital Management beneficially owns 1,617,321 shares of common stock, representing 5.26% of the class. The filing shows Vanguard has sole dispositive power over 1,617,321 shares and sole voting power for 234,551 shares. The disclosure is signed by the Head of Global Fund Administration and filed on 04/29/2026.
Axcelis Technologies Inc reported that Vanguard Portfolio Management beneficially owns 2,501,359 shares of common stock, representing 8.14% of the class as of 03/31/2026. The filing states Vanguard has sole voting power over 13,066 shares and sole dispositive power over 2,501,359 shares, and describes ownership as held across Vanguard affiliates and client accounts.
Axcelis Technologies executive Christopher Tatnall had 907 shares of common stock withheld for taxes in connection with restricted stock units vesting. The tax withholding was valued at $131.02 per share, based on the closing price on the withholding date.
After this vesting and tax withholding, Tatnall directly holds 23,044 shares, including 16,463 shares issuable upon vesting of restricted stock units that remain subject to forfeiture under the company’s 2012 Equity Incentive Plan.
Axcelis Technologies president and CEO Russell Low executed an open-market sale of 1,244 shares of common stock at $94.06 per share on April 1, 2026. The transaction was made under a pre-arranged Rule 10b5-1 trading plan adopted on December 11, 2025.
Following this sale, Low directly holds 132,282 shares of Axcelis common stock. Of these, 83,480 shares are issuable upon vesting of restricted stock units granted under the 2012 Equity Incentive Plan and remain subject to forfeiture.
ACLS affiliate filed a Section 144 notice reporting the proposed sale of 1,244 shares of Common Stock. The filing references Restricted Stock Units granted 02/28/2023 and a 10b5-1 sale executed 03/24/2026 that lists $111,960.00. The filing date shown is 04/01/2026.
Axcelis Technologies is asking stockholders to vote at its May 5, 2026 annual meeting on three main items: electing eight directors, ratifying Ernst & Young LLP as independent auditor for 2026, and approving 2025 executive compensation in an advisory Say-on-Pay vote.
Only holders of the 30,729,970 shares outstanding as of March 12, 2026 may vote, with one vote per share. The proxy details strong prior support, including 92.67% average director support and 87.1% backing for 2024 pay in 2025. It highlights 2025 results of $839 million in revenue and $3.80 diluted EPS, an 18% revenue decline but improved margins, 14% growth in Customer Solutions & Innovation revenue, and a focus on power device tools, which were 54% of 2025 system shipment value.
Executive pay remains heavily performance-based: the 2025 team incentive funded at 103.1% of target and performance-based RSUs earned at 112.5% of target, leading to realized CEO pay at about 104% of 2025 target and other named executives averaging about 102%.
AXCELIS TECHNOLOGIES INC president and CEO Russell Low reported an open-market sale of 1,244 shares of common stock at $90.00 per share on March 24, 2026. After the sale, he directly holds 133,526 shares, including 83,480 shares issuable upon vesting of restricted stock units that remain subject to forfeiture.
The transaction was executed under a pre-arranged Rule 10b5-1 trading plan adopted on December 11, 2025, indicating it was scheduled in advance rather than timed discretionarily. Overall, the sale represents a small portion of his total reported holdings.
Axcelis Technologies Inc ownership disclosure: The Vanguard Group filed an Amendment No. 9 to Schedule 13G/A reporting 0 shares beneficially owned, representing 0% of the class. The filing explains an internal realignment on January 12, 2026 and reliance on SEC Release No. 34-39538 for disaggregated reporting.
The filing states Vanguard subsidiaries and business divisions will report holdings separately and that Vanguard no longer is deemed to beneficially own securities held by those units.
Axcelis Technologies VP Corporate Controller Todd Sutton filed an initial ownership report showing he directly holds 10,391 shares of common stock. As of March 12, 2026, 5,538 of these shares are issuable upon vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.