Entegris director granted 1,412 stock units

PUMA MARY G reported acquisition or exercise transactions in this Form 4 filing.

Rhea-AI Filing Summary

PUMA MARY G reported acquisition or exercise transactions in this Form 4 filing.

ENTEGRIS INC director Mary G. Puma received an equity grant in the form of 1,412 Restricted Stock Units (RSUs) payable solely in common stock under the Entegris, Inc. 2020 Stock Plan. These RSUs were awarded on May 6, 2026 as compensation for her services as an independent director.

The RSUs vest in full on the earlier of the first anniversary of the grant or the date of the company’s 2027 annual meeting of stockholders. Following this award, Puma directly holds 5,516 shares of common stock, reflecting a modest, routine increase in her ownership stake.

Insider Trade Summary

Grant/Award: 1,412 shares

Grant/Award 1 txn

Insider PUMA MARY G

Role Director

Type	Security	Shares	Price	Value
Grant/Award	Common Stock	1,412	$0.00	$0.00

Holdings After Transaction: Common Stock — 5,516 shares (Direct)

Footnotes (2)

1. F1. These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.
2. F2. These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

Key Figures

RSUs granted: 1,412 units Grant price: $0.00 per share Shares after grant: 5,516 shares +1 more

4 metrics

RSUs granted 1,412 units Restricted Stock Units awarded May 6, 2026

Grant price $0.00 per share Equity compensation, not an open-market purchase

Shares after grant 5,516 shares Total common stock held directly by Mary G. Puma

Vesting trigger Earlier of 1-year or 2027 meeting RSUs vest by first anniversary or 2027 annual stockholders’ meeting

Key Terms

Restricted Stock Units, Entegris, Inc. 2020 Stock Plan, independent directors

3 terms

Restricted Stock Units financial

"These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant..."

Restricted stock units are a type of company reward where employees are promised shares of stock, but they only fully own these shares after meeting certain conditions, like staying with the company for a set time. They matter because they can become valuable assets and are often used to motivate employees to help the company succeed.

Entegris, Inc. 2020 Stock Plan financial

"pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units..."

independent directors financial

"provides for the award of Restricted Stock Units to independent directors in consideration for services as such"

Members of a company’s board who do not have significant business, family, or financial ties to the company and are not part of its management; they are chosen to provide impartial oversight of strategy, financial reporting, executive pay and risk. They matter to investors because independent directors act like an objective referee, helping ensure decisions favor shareholders’ long-term interests rather than insiders, which can strengthen trust and reduce the chance of mismanagement or conflicts of interest.

FAQ

AI-generated questions and answers. How Rhea-AI works. Not financial advice.

What insider transaction did ENTEGRIS INC (ENTG) report for Mary G. Puma?

ENTEGRIS INC reported that director Mary G. Puma received an award of 1,412 Restricted Stock Units (RSUs) on May 6, 2026. The RSUs are payable solely in common stock as part of equity compensation for her board service.

How many Entegris (ENTG) shares does Mary G. Puma hold after this Form 4 transaction?

After the RSU award, Mary G. Puma directly holds 5,516 shares of Entegris common stock. This figure reflects her position following the grant of 1,412 Restricted Stock Units reported in the Form 4 filing.

When do Mary G. Puma’s 1,412 Entegris RSUs from May 2026 vest?

The 1,412 RSUs awarded to Mary G. Puma vest in full on the earlier of the first anniversary of the May 6, 2026 grant or the date of Entegris’ 2027 Annual Meeting of Stockholders, whichever comes first.

What plan governs the 1,412 RSU grant to Entegris director Mary G. Puma?

The 1,412 RSU grant to Mary G. Puma was made under the Entegris, Inc. 2020 Stock Plan. This plan provides for RSU awards to independent directors as consideration for their services on the company’s board.

Is Mary G. Puma’s Entegris RSU grant a purchase or a compensation award?

Mary G. Puma’s 1,412 Entegris RSUs are a compensation award, not an open-market purchase. The Form 4 labels the transaction as a grant or award acquisition, with a $0.00 price per share, reflecting stock-based director compensation.

AI-generated analysis. How Rhea-AI works. Not financial advice.

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Accepted by SEC EDGAR 05/08/2026 - 12:54 PM Learn about SEC filing dates

SEC Form 4

FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

OMB APPROVAL

OMB Number:			3235-0287
Estimated average burden
hours per response:			0.5

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

Check this box to indicate that a transaction was made pursuant to a contract, instruction or written plan for the purchase or sale of equity securities of the issuer that is intended to satisfy the affirmative defense conditions of Rule 10b5-1(c). See Instruction 10.

1. Name and Address of Reporting Person^*

PUMA MARY G

(Last) (First) (Middle)

C/O ENTEGRIS

129 CONCORD ROAD

(Street)

BILLERICA MASSACHUSETTS 01821

(City) (State) (Zip)

UNITED STATES

(Country)

2. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ ENTG ]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

X	Director		10% Owner
	Officer (give title below)		Other (specify below)

2a. Foreign Trading Symbol

3. Date of Earliest Transaction (Month/Day/Year)
05/06/2026

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

4. If Amendment, Date of Original Filed (Month/Day/Year)

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	05/06/2026		A		1,412(1)	A	$0(2)	5,516	D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:

1. These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

2. These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

Remarks:

	/s/ Joseph Colella, Attorney-in-Fact for Mary Puma	05/08/2026
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.
* Form 4: SEC 1474 (03-26)