Axcelis director receives 1,440-share RSU grant

GRAVES GREGORY B reported acquisition or exercise transactions in this Form 4 filing.

Rhea-AI Filing Summary

GRAVES GREGORY B reported acquisition or exercise transactions in this Form 4 filing.

Axcelis Technologies director Gregory B. Graves reported an equity award of 1,440 shares of Common Stock in the form of restricted stock units. The award was granted on May 15, 2026 at no cash cost and will vest on May 15, 2027, assuming he completes his current Board term.

Following this grant, Graves’ reported holdings total 8,698 shares of Common Stock. Of the shares held as of May 15, 2026, 2,110 shares are also in the form of restricted stock units granted under the 2012 Equity Incentive Plan and remain subject to forfeiture.

Insider Trade Summary

Grant/Award: 1,440 shares

Grant/Award 1 txn

Insider GRAVES GREGORY B

Role Director

Type	Security	Shares	Price	Value
Grant/Award	Common Stock	1,440	$0.00	$0.00

Holdings After Transaction: Common Stock — 8,698 shares (Direct)

Footnotes (2)

1. F1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.
2. F2. Of the shares held as of May 15, 2026, 2,110 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Key Figures

RSU grant size: 1,440 shares Holdings after transaction: 8,698 shares RSUs subject to forfeiture: 2,110 shares

3 metrics

RSU grant size 1,440 shares Restricted stock units granted on May 15, 2026

Holdings after transaction 8,698 shares Total Common Stock reported following the RSU grant

RSUs subject to forfeiture 2,110 shares Restricted stock units held as of May 15, 2026

Key Terms

restricted stock units, 2012 Equity Incentive Plan, subject to forfeiture

3 terms

restricted stock units financial

"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan"

Restricted stock units are a type of company reward where employees are promised shares of stock, but they only fully own these shares after meeting certain conditions, like staying with the company for a set time. They matter because they can become valuable assets and are often used to motivate employees to help the company succeed.

2012 Equity Incentive Plan financial

"restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026"

subject to forfeiture financial

"2,110 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture"

FAQ

AI-generated questions and answers. How Rhea-AI works. Not financial advice.

What did Axcelis Technologies (ACLS) director Gregory Graves report in this Form 4?

Gregory B. Graves reported receiving 1,440 shares of Axcelis Common Stock as restricted stock units. These units were granted at no cash cost and increase his total reported holdings to 8,698 shares, including other restricted stock units subject to vesting and forfeiture conditions.

How many Axcelis (ACLS) shares did Gregory Graves acquire in the latest equity award?

Gregory B. Graves acquired 1,440 shares of Axcelis Common Stock through a grant of restricted stock units. The award was made under the company’s 2012 Equity Incentive Plan and represents additional equity compensation rather than an open-market purchase for cash.

When do Gregory Graves’ newly granted Axcelis (ACLS) restricted stock units vest?

The 1,440 restricted stock units granted to Gregory B. Graves on May 15, 2026 are scheduled to vest on May 15, 2027. Vesting is conditioned on his completion of the current term of service on Axcelis’ Board of Directors.

What are Gregory Graves’ total reported Axcelis (ACLS) holdings after this Form 4 transaction?

After the reported grant, Gregory B. Graves holds 8,698 shares of Axcelis Common Stock. This total includes both fully vested shares and restricted stock units, reflecting his combined direct equity stake as disclosed in the Form 4 filing.

How many of Gregory Graves’ Axcelis (ACLS) shares are still subject to forfeiture?

Of the shares held as of May 15, 2026, 2,110 shares are issuable upon vesting of restricted stock units and are subject to forfeiture. These awards were granted under Axcelis’ 2012 Equity Incentive Plan and carry service-based vesting conditions.

Was Gregory Graves’ Axcelis (ACLS) Form 4 transaction an open-market buy or a compensation grant?

The transaction was a compensation-related grant of 1,440 restricted stock units, not an open-market share purchase. The Form 4 classifies it as a grant or award acquisition with a transaction price of $0.0000 per share, reflecting non-cash equity compensation.

AI-generated analysis. How Rhea-AI works. Not financial advice.

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Accepted by SEC EDGAR 05/18/2026 - 05:05 PM Learn about SEC filing dates

SEC Form 4

FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

OMB APPROVAL

OMB Number:			3235-0287
Estimated average burden
hours per response:			0.5

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

Check this box to indicate that a transaction was made pursuant to a contract, instruction or written plan for the purchase or sale of equity securities of the issuer that is intended to satisfy the affirmative defense conditions of Rule 10b5-1(c). See Instruction 10.

1. Name and Address of Reporting Person^*

GRAVES GREGORY B

(Last) (First) (Middle)

C/O AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE

(Street)

BEVERLY MASSACHUSETTS 01915

(City) (State) (Zip)

UNITED STATES

(Country)

2. Issuer Name and Ticker or Trading Symbol
AXCELIS TECHNOLOGIES INC [ ACLS ]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

X	Director		10% Owner
	Officer (give title below)		Other (specify below)

2a. Foreign Trading Symbol

3. Date of Earliest Transaction (Month/Day/Year)
05/15/2026

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

4. If Amendment, Date of Original Filed (Month/Day/Year)

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	05/15/2026		A		1,440	A	$0(1)	8,698(2)	D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:

1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

2. Of the shares held as of May 15, 2026, 2,110 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

	/s/ Eileen J. Evans, Attorney-in-Fact	05/18/2026
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.
* Form 4: SEC 1474 (03-26)