Axcelis director granted 1,440 RSUs in Form 4

Chiu Tzu Yin reported acquisition or exercise transactions in this Form 4 filing.

Rhea-AI Filing Summary

Chiu Tzu Yin reported acquisition or exercise transactions in this Form 4 filing.

Axcelis Technologies director Tzu Yin Chiu received a grant of 1,440 shares of Common Stock in the form of restricted stock units (RSUs). The RSUs were granted on May 15, 2026 at no cash cost and are scheduled to vest on May 15, 2027 assuming completion of the director’s current Board term. After this award, the director holds 11,843 shares directly, including 1,440 unvested RSUs that are subject to forfeiture.

Insights

Equity Compensation Analyst

Routine director RSU grant; non-cash and compensation-related.

The filing shows Tzu Yin Chiu, a director of Axcelis Technologies, receiving 1,440 restricted stock units under the 2012 Equity Incentive Plan on May 15, 2026. The transaction is coded as a grant/award acquisition at a price of $0.00 per share, indicating standard equity compensation rather than a market purchase.

These RSUs will vest on May 15, 2027 if the director completes the current Board term, and are currently subject to forfeiture. Following the grant, total direct holdings are 11,843 shares, so the award is modest in scale and does not materially change ownership. Overall, this appears to be a routine governance and compensation event rather than a directional trading signal.

Insider Trade Summary

Grant/Award: 1,440 shares

Grant/Award 1 txn

Insider Chiu Tzu Yin

Role Director

Type	Security	Shares	Price	Value
Grant/Award	Common Stock	1,440	$0.00	$0.00

Holdings After Transaction: Common Stock — 11,843 shares (Direct)

Footnotes (2)

1. F1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.
2. F2. Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Key Figures

RSU grant size: 1,440 shares Grant price: $0.00 per share Shares after transaction: 11,843 shares +1 more

4 metrics

RSU grant size 1,440 shares Restricted stock units granted on May 15, 2026

Grant price $0.00 per share Compensation grant, not a market purchase

Shares after transaction 11,843 shares Total direct holdings following RSU grant

RSU vesting date May 15, 2027 Vesting conditioned on completion of Board term

Key Terms

restricted stock units, 2012 Equity Incentive Plan, subject to forfeiture, grant, award, or other acquisition

4 terms

restricted stock units financial

"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan"

Restricted stock units are a type of company reward where employees are promised shares of stock, but they only fully own these shares after meeting certain conditions, like staying with the company for a set time. They matter because they can become valuable assets and are often used to motivate employees to help the company succeed.

2012 Equity Incentive Plan financial

"restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026"

subject to forfeiture financial

"1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture"

grant, award, or other acquisition financial

"transaction code description shows Grant, award, or other acquisition for this Form 4 entry"

FAQ

AI-generated questions and answers. How Rhea-AI works. Not financial advice.

What did Axcelis Technologies (ACLS) director Tzu Yin Chiu report in this Form 4?

The Form 4 reports that director Tzu Yin Chiu received a grant of 1,440 restricted stock units of Axcelis Technologies Common Stock on May 15, 2026. This is a compensation-related equity award rather than an open-market stock purchase or sale.

How many Axcelis Technologies (ACLS) shares does the director hold after this grant?

After the grant, the director holds 11,843 shares of Axcelis Technologies Common Stock directly. This total includes 1,440 shares that are issuable upon vesting of restricted stock units and are currently subject to forfeiture under the company’s 2012 Equity Incentive Plan.

When will the 1,440 restricted stock units granted to the Axcelis director vest?

The 1,440 restricted stock units granted on May 15, 2026 are scheduled to vest on May 15, 2027. Vesting is conditioned on the director’s completion of the current term of service on Axcelis Technologies’ Board of Directors, and the units may be forfeited if this condition is not met.

Did the Axcelis Technologies (ACLS) director pay cash for the 1,440 share award?

No, the director did not pay cash for this award. The transaction is coded as a grant or award acquisition at a price of $0.00 per share, indicating it is part of Axcelis Technologies’ equity compensation program rather than a market transaction.

What plan governs the restricted stock units granted to the Axcelis Technologies director?

The restricted stock units were granted under Axcelis Technologies’ 2012 Equity Incentive Plan. The filing states that 1,440 shares are issuable upon vesting of these RSUs and that they are subject to forfeiture, highlighting their incentive and retention nature for the Board member.

AI-generated analysis. How Rhea-AI works. Not financial advice.

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Accepted by SEC EDGAR 05/18/2026 - 05:05 PM Learn about SEC filing dates

SEC Form 4

FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

OMB APPROVAL

OMB Number:			3235-0287
Estimated average burden
hours per response:			0.5

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

Check this box to indicate that a transaction was made pursuant to a contract, instruction or written plan for the purchase or sale of equity securities of the issuer that is intended to satisfy the affirmative defense conditions of Rule 10b5-1(c). See Instruction 10.

1. Name and Address of Reporting Person^*

Chiu Tzu Yin

(Last) (First) (Middle)

C/O AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE

(Street)

BEVERLY MASSACHUSETTS 01915

(City) (State) (Zip)

UNITED STATES

(Country)

2. Issuer Name and Ticker or Trading Symbol
AXCELIS TECHNOLOGIES INC [ ACLS ]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

X	Director		10% Owner
	Officer (give title below)		Other (specify below)

2a. Foreign Trading Symbol

3. Date of Earliest Transaction (Month/Day/Year)
05/15/2026

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

4. If Amendment, Date of Original Filed (Month/Day/Year)

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	05/15/2026		A		1,440	A	$0(1)	11,843(2)	D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:

1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

2. Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

	/s/ Eileen J. Evans, Attorney-in-Fact	05/18/2026
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.
* Form 4: SEC 1474 (03-26)