Axcelis director awarded 1,440 restricted shares

Quirk Jeanne reported acquisition or exercise transactions in this Form 4 filing.

Accepted by SEC EDGAR 05/18/2026 - 05:05 PM EDT Learn about SEC filing dates

Rhea-AI Filing Summary

Quirk Jeanne reported acquisition or exercise transactions in this Form 4 filing.

Axcelis Technologies director Jeanne Quirk received a grant of 1,440 shares of Common Stock in the form of restricted stock units at no cash cost. These units were granted under the company’s 2012 Equity Incentive Plan and will vest on May 15, 2027, assuming she completes her current Board term. After this grant, she directly holds 13,189 shares, including 1,440 unvested units that are subject to forfeiture.

Insider Trade Summary

Grant/Award: 1,440 shares

Grant/Award 1 txn

Insider Quirk Jeanne

Role Director

Type	Security	Shares	Price	Value
Grant/Award	Common Stock	1,440	$0.00	$0.00

Holdings After Transaction: Common Stock — 13,189 shares (Direct)

Footnotes (2)

1. F1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.
2. F2. Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Key Figures

RSU grant size: 1,440 shares Grant price per share: $0.0000 per share Total shares after transaction: 13,189 shares +2 more

5 metrics

RSU grant size 1,440 shares Restricted stock units granted on May 15, 2026

Grant price per share $0.0000 per share Equity award, not an open-market purchase

Total shares after transaction 13,189 shares Direct Common Stock holdings following the grant

Unvested RSUs included in holdings 1,440 shares Issuable upon vesting and subject to forfeiture

RSU vesting date May 15, 2027 Vests assuming completion of current Board term

Key Terms

restricted stock units, 2012 Equity Incentive Plan, subject to forfeiture, Grant, award, or other acquisition

4 terms

restricted stock units financial

"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan"

Restricted stock units are a type of company reward where employees are promised shares of stock, but they only fully own these shares after meeting certain conditions, like staying with the company for a set time. They matter because they can become valuable assets and are often used to motivate employees to help the company succeed.

2012 Equity Incentive Plan financial

"restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026"

subject to forfeiture financial

"1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture"

Grant, award, or other acquisition financial

"transaction code description: Grant, award, or other acquisition"

FAQ

AI-generated questions and answers. How Rhea-AI works. Not financial advice.

What did Axcelis (ACLS) director Jeanne Quirk report in this Form 4?

Jeanne Quirk reported receiving 1,440 shares of Axcelis Common Stock as restricted stock units. The grant was made under the 2012 Equity Incentive Plan at no cash cost, increasing her direct holdings to 13,189 shares, including unvested units.

How many Axcelis (ACLS) shares were granted to Jeanne Quirk and at what price?

Jeanne Quirk was granted 1,440 shares of Axcelis Common Stock in the form of restricted stock units at a price of $0.0000 per share. This reflects a compensation award, not an open-market purchase or sale of stock.

When do Jeanne Quirk’s Axcelis (ACLS) restricted stock units vest?

The 1,440 restricted stock units granted to Jeanne Quirk will vest on May 15, 2027. Vesting is conditioned on completion of her current term of service on the Axcelis Board of Directors, as described in the award footnote.

What is Jeanne Quirk’s Axcelis (ACLS) share ownership after this transaction?

After the grant, Jeanne Quirk directly owns 13,189 shares of Axcelis Common Stock. This total includes 1,440 shares issuable upon vesting of restricted stock units granted under the 2012 Equity Incentive Plan, which remain subject to forfeiture.

Is Jeanne Quirk’s Axcelis (ACLS) Form 4 transaction a market buy or sell?

The Form 4 reflects a grant of 1,440 restricted stock units, not a market buy or sell. The transaction code “A” indicates a grant or award acquisition, with a stated price of $0.0000 per share as part of equity compensation.

Under which plan were Jeanne Quirk’s Axcelis (ACLS) restricted units granted?

The 1,440 restricted stock units were granted under Axcelis Technologies’ 2012 Equity Incentive Plan. The footnotes explain these shares are issuable upon vesting and are subject to forfeiture if service conditions are not met.

AI-generated analysis. How Rhea-AI works. Not financial advice.

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SEC Form 4

FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

OMB APPROVAL

OMB Number:			3235-0287
Estimated average burden
hours per response:			0.5

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

Check this box to indicate that a transaction was made pursuant to a contract, instruction or written plan for the purchase or sale of equity securities of the issuer that is intended to satisfy the affirmative defense conditions of Rule 10b5-1(c). See Instruction 10.

1. Name and Address of Reporting Person^*

Quirk Jeanne

(Last) (First) (Middle)

C/O AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE

(Street)

BEVERLY MASSACHUSETTS 01915

(City) (State) (Zip)

UNITED STATES

(Country)

2. Issuer Name and Ticker or Trading Symbol
AXCELIS TECHNOLOGIES INC [ ACLS ]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

X	Director		10% Owner
	Officer (give title below)		Other (specify below)

2a. Foreign Trading Symbol

3. Date of Earliest Transaction (Month/Day/Year)
05/15/2026

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

4. If Amendment, Date of Original Filed (Month/Day/Year)

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	05/15/2026		A		1,440	A	$0(1)	13,189(2)	D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:

1. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

2. Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

	/s/ Eileen J. Evans, Attorney-in-Fact	05/18/2026
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.
* Form 4: SEC 1474 (03-26)