Advanced Energy Introduces 401M Mid-Infrared Pyrometer for Precise Semiconductor Process Control
Next generation sensor delivers fast, accurate, and customizable temperature measurement for advanced epitaxy and deposition applications
“The 401M sets a new benchmark in speed, accuracy and repeatability,” said Dhaval Dhayatkar, Advanced Energy’s vice president, Critical Sensing and Control, System Power. “By providing reliable, interference-free monitoring of chamber conditions, the 401M supports process innovation and operational efficiency in semiconductor and industrial processes.”
Engineered for speed and accuracy, the 401M enables real-time closed-loop control with response times as low as 1 microsecond and accuracy within ±3°C across a wide temperature range of 50°C to 1,300°C, based on measurement wavelength. Its mid-infrared technology is ideal for preferential measurement through transparent surfaces, as well as outside of the process environment, making it ideal for lamp-heated epitaxy, CVD, and thin-film glass coating processes where traditional near-IR pyrometers are ineffective.
“The 401M sets a new benchmark in speed, accuracy and repeatability,” said Dhaval Dhayatkar, Advanced Energy’s vice president, Critical Sensing and Control, System Power. “By providing reliable, interference-free monitoring of chamber conditions, the 401M supports process innovation and operational efficiency in semiconductor and industrial processes.”
With EtherCAT® communication built into the hardware, the 401M eliminates the need for external modules, simplifying tool integration and reducing potential failure points. Customizable measurement wavelengths, temperature range, working distance and spot size enable it to be adapted across various deposition environments and materials, meeting the evolving needs of advanced process environments. It is backwards compatible with the existing OR400M platform, for a simple and cost-effective upgrade.
The 401M will be showcased at SEMICON West,
For more information on the 401M, please visit here.
About Advanced Energy
Advanced Energy (Nasdaq: AEIS) is a global leader in the design and manufacturing of highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex applications for a wide range of industries including semiconductor equipment, industrial, manufacturing, telecommunications, data center computing and healthcare. With engineering know-how and responsive service and support around the globe, the company builds collaborative partnerships to meet technology advances, propel growth for its customers and innovate the future of power. Advanced Energy has devoted four decades to perfecting power for its global customers and is headquartered in
For more information, visit www.advancedenergy.com.
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Source: Advanced Energy Industries, Inc.
