Axcelis Announces Participation in The International Conference on Silicon Carbide and Related Materials (ICSCRM 2025)

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Axcelis Technologies (NASDAQ: ACLS) announced its participation in the International Conference on Silicon Carbide and Related Materials (ICSCRM 2025), scheduled for September 14-19, 2025, in Busan, South Korea. The company will showcase its new Purion Power Series+™ and GSD Ovation ES platforms for next-generation power devices.

Three technical presentations will be delivered at the conference, focusing on superjunction industrialization, high-energy channeling implantation processes, and thermal oxidation effects. CEO Dr. Russell Low emphasized the importance of ICSCRM as a key technology forum in the power semiconductor market and highlighted Axcelis's technical expertise in silicon carbide applications.

BEVERLY, Mass., Sept. 9, 2025 /PRNewswire/ -- Axcelis Technologies, Inc. (NASDAQ: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, will be participating in the International Conference on Silicon Carbide and Related Materials (ICSCRM 2025) taking place September 14 - 19, 2025, at the Bexco Convention Center in Busan, South Korea.

During the conference, Axcelis will be promoting the launch of the Company's new Purion Power Series+™ and GSD Ovation ES platforms, designed specifically to enable improved device capability and productivity for next generation Power devices for all single wafer and batch applications.

Axcelis technologists and collaborators will present the following topics during the ICSCRM technical forum:

• Path for Superjunction Industrialization by Single Step High Energy Channeling Implant
  Presented by Dr. Fulvio Mazzamuto, Axcelis Technologies
  
  
• Development of High Energy Channeling Implantation Process for SiC Superjunction Devices
  Presented by Dr. Reza Ghandi, GE Global Research
  
  
• Effect of Silicon and Oxygen Pre-Implantation on Thermal Oxidation of 4H-SiC
  Presented by Dr. Enrico Sangregorio, CNR IMM

President and CEO Dr. Russell Low, said, "We're pleased to participate in ICSCRM 2025, one of the most important technology forums in the power semiconductor market. We are especially excited about presenting our work on next generation solutions for silicon carbide and related materials applications, which is the result of multiple collaborations with leading device makers and research consortium. Axcelis has deep technical expertise in this area, and we look forward to engaging with our customers and facilitating the exchange of novel insights."

For more information on the event, visit the conference website at https://icscrm2025.org/.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 45 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Investor Relations Contact:
David Ryzhik
Senior Vice President, Investor Relations and Corporate Strategy
Telephone: (978) 787-2352
Email: David.Ryzhik@axcelis.com

Press/Media Relations Contact: 
Maureen Hart
Senior Director, Corporate & Marketing Communications
Telephone: (978) 787-4266
Email: Maureen.Hart@axcelis.com

 

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SOURCE Axcelis Technologies, Inc.

FAQ

When and where is Axcelis (NASDAQ: ACLS) presenting at ICSCRM 2025?

Axcelis will present at ICSCRM 2025 from September 14-19, 2025 at the Bexco Convention Center in Busan, South Korea.

What new products will Axcelis showcase at ICSCRM 2025?

Axcelis will showcase the Purion Power Series+™ and GSD Ovation ES platforms, designed for improved device capability and productivity in next-generation Power devices.

What topics will Axcelis present at ICSCRM 2025?

Axcelis will present three topics: Superjunction Industrialization, High Energy Channeling Implantation Process for SiC Devices, and Silicon and Oxygen Pre-Implantation effects on Thermal Oxidation of 4H-SiC.

Who will be presenting on behalf of Axcelis at ICSCRM 2025?

Presentations will be delivered by Dr. Fulvio Mazzamuto from Axcelis Technologies, along with collaborators Dr. Reza Ghandi from GE Global Research and Dr. Enrico Sangregorio from CNR IMM.